After the course completion, the students will be:
1. Understand the basic microelectronic devices and know the materials and the fabrication technology.
2. Understand basic elemnets of lithographic techniques.
3. Understand the evolution of intergrated circuit technology to nanoscale.
Course Content (Syllabus)
Microelectronics and basic nanoelectronics. Physical design and structure of the MOS transistor, materials and devices. Integrated circuit manufacturing technology. Lithography, basic techniques and applications. Future technology of microelectronics devices and further development of the integrated circuits at nanoscale.